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Amorphous Silicon Carbide for MEMS Applications


Marketed By :  VDM Verlag Dr. Müller   Sold By :  Kamal Books International  
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  • Product Description

This work describes the development of MEMS fabrication techniques for amorphous Silicon Carbide (a-SiC). Mechanical and chemical characterization studies demonstrate the extensive applicability of a-SiC to a wide variety of MEMS applications due its high Young''s modulus and chemical resistivity to most common MEMS etchants. Techniques for patterning a-SiC have been also been developed in this work. Integration of a-SiC based MEMS devices with Stereolithography is explored in this work and a method of integration of stereolithographic structures into MEMS devices with high alignment accuracy is described. The test case used in this work to demonstrate the applicability of a-SiC to MEMS is a microscaled four point probe.

Product Specifications
SKU :COC38645
AuthorArnab Choudhury
Number of Pages180
Publishing Year12/22/2010
Edition1 st
Book TypeProduction engineering
Country of ManufactureIndia
Product BrandVDM Verlag Dr. Müller
Product Packaging InfoBox
In The Box1 Piece
Product First Available On ClickOnCare.com2015-07-31 00:00:00
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