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Boron nitride thin films


Marketed By :  VDM Verlag Dr. Müller   Sold By :  Kamal Books International  
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  • Product Description

In this work we present the results of the thin films of boron nitride deposited by D.C. and R.F. magnetron sputtering from hot-pressed B4C and h-BN targets on two different substrates: Si3N4 ceramics with different surface finishing and Si(100) wafers. The influence of parameters such as substrate temperature and working gas composition ratio (N2 or Ar), on film thickness, deposition rate, cristallinity, residual stress, phase composition and hardness, were systematically investigated using techniques like SEM, XRD, FT-IR and nanohardness.

Product Specifications
SKU :COC38627
AuthorJean Lorenzzi
Number of Pages96
Publishing Year7/13/2010
Edition1 st
Book TypeProduction engineering
Country of ManufactureIndia
Product BrandVDM Verlag Dr. Müller
Product Packaging InfoBox
In The Box1 Piece
Product First Available On ClickOnCare.com2015-07-31 00:00:00
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