In the past decade, the role of micromachining has fastly grown in biomedical applications, especially in the field of microfluidics. In this revolution, the versatility of silicon technology is of key importance . In this book, interdisciplinary research on a silicon neural microelectrode capable of local drug delivery and a microfluidic environment for an electrochemical sensor suitable for single-molecule detection is presented. Theoretical background, design aspects, microfabrication techniques and functional characterizations are in the focus of the chapters, which are supported by a well-described experimental work of the author. The book is recommended for readers, who are specialized in the development of silicon-based microfluidics for biosensors or anyone, who are interested in some novel improvements in biomedical technology.