There has been an increase in worldwide interest in ultra precision machining research over the last decade. Drastic international competition has addressed the underlying necessities for predictability, repeatability and productivity in manufacturing with high accuracy. This book describes an approach for investigation of the generation of high precision surfaces in relation to the affecting factors from the machine tool, cutting tool, workpiece material and operation conditions in precision manufacturing. It also presents application of the cutting edge molecular dynamics simulation approach in the study of material removals mechanism in nanometer level. The book will of interest to senior undergraduate students, graduate students and researches in the field of precision, micro & nano machining.