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Immersion Nanoimprint Lithography


Marketed By :  LAP LAMBERT Academic Publishing   Sold By :  Kamal Books International  
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  • Product Description

Thermal nanoimprinting is used to modify a manufacturing process as simple fabrication technology that transfers a fine pattern by pressing a mold with nanoscale patterns against a thermoplastic. The molds can be categorized roughly into two types, namely, a positive mold with a convex pattern, and a negative mold with a concave pattern compared with the base level. Around each concave imprinted pattern, the compressed air that is caused by the imprint pressure, generates capillary bridges; and in case of a convex imprinted pattern the trapped air remaining inside the concave mold pattern gives rise to bubble defects. In order to remove such defective molding, I propose a novel technique that I name as “immersion nanoimprint” where a fluorine liquid is inserted between the mold pattern and the molding material. In this technique, a fluorine liquid improved accuracy remarkably, and realized a complete filling at a low imprint pressure. Also, it was confirmed that the uniformity was greatly improved by improved heat transfer. Thus the immersion nanoimprint lithography is expected to be one of the epoch-making solution that can dramatically decrease the formation of defective molding.

Product Specifications
SKU :COC92530
AuthorHarutaka Mekaru
Number of Pages76
Publishing Year2013-11-23T00:00:00.000
Edition1 st
Book TypeProduction engineering
Country of ManufactureIndia
Product BrandLAP LAMBERT Academic Publishing
Product Packaging InfoBox
In The Box1 Piece
Product First Available On ClickOnCare.com2015-10-08 00:00:00