Recent advances in Materials Science and Technology have paved the way for an array of wireless microdevices with ever increasing functionalities. The trend of power sources, in accordance with the shrinkage in the size of electronic devices, shifted from city line to regular batteries, and final goal may be miniaturized power sources. Rechargeable solid state batteries are the key components of the modern portable electronic equipment required by today''s information rich mobile society. Lithium Cobalt Oxide is the most attractive cathode material for the rechargeable Li-ion battery, because it has high specific capacity, high operating cell voltage and excellent rechargeability. Systematic and detailed investigations were made on the growth and characterization of Lithium Cobalt Oxide Cathode thin films considering the importance of these films as binder-free cathode layers in the fabrication of all solid state thin film microbattery. Pulsed laser deposition technique, a novel, versatile method, has been employed for the growth of Lithium Cobalt Oxide thin films. The electrochemical characteristics of these films were also studied.