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Laser Damage in Calcium Fluoride


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  • Product Description

Calcium fluoride is a key lens material in deep-ultraviolet microlithography. However, exposure to high fluences of the application wavelength, 193 nm, results in coloring of the material and degrading of its optical properties. Based on theoretical modeling and with the support of experimental evidence, the damage process is discussed from the initial matter-light interaction to the formation of complex radiation damage structures. Understanding laser damage ? or radiation damage in general ? is crucial for the development of future high-performance optical materials.

Product Specifications
SKU :COC101259
AuthorStephan Rix
Number of Pages132
Publishing Year2011-12-07T00:00:00.000
Edition1 st
Book TypePhysics
Country of ManufactureIndia
Product BrandNot defined
Product Packaging InfoBox
In The Box1 Piece
Product First Available On ClickOnCare.com2015-08-18 00:00:00