Various statistical features can be used to characterize the surface in quantitative way. Such an analysis can be done by the multi-resolution capabilities of wavelet transforms (WT) of the surface microscopic image. A multi-scale molecular model can help to investigate the physical and chemical mechanism in manufacturing process. Multiresolution characterization can be performed on the model structure to compare with image analysis. In this book, we have used a soft polymeric surface and applied multiresolution characterization for surface feature extraction and multiscale modeling for optimizing system variables to get desired surface characteristics. In microfabrication, the efficiency of the product reduced by line-edge roughness (LER). Off-line LER characterization is usually based on the top-down SEM image. This book shows wavelet based segmentation method for edge searching region as well as wavelet based characterization. For mesoscale modeling, the Flory-Huggins interaction parameters of the clusters of atoms or molecules are used. We have identified the phase separation by spinodal decomposition resulting in the formation of LER on polymer surface.