The combination of solid state materials science with thin film technology has significantly reduced the sizes of electronic components / devices for various scientific and technological applications from console to portable and then to miniaturization. The thin film microelectronic circuit technology requires several types of thin films for a variety of applications. The current state of thin film technology is the result of continuous hard research in the development of new and reliable deposition technologies. Rechargeable solid state batteries are the key components of the modern portable electronic equipment required by today’s information rich mobile society. Lithium Cobaltate is the most attractive cathode material for the rechargeable Li-ion battery, because it has high specific capacity, high operating cell voltage and excellent rechargeability. The effect of oxygen pressure on the growth and characterization of Lithium Cobaltate thin films was systematically studied. Pulsed laser deposition technique, a novel, versatile and effective method, has been employed for the growth of Lithium Cobaltate thin films. The detailed investigations were presented.