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Silicon Film and Surface Preparation

 

Marketed By :  LAP LAMBERT Academic Publishing   Sold By :  Kamal Books International  
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Rs. 4,016

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  • Product Description
 

Silicon is an excellent material for microelectronics, power electronics and solar cells. For these applications, silicon films and surfaces are convenient. But, its production needs significantly high level process technology and engineering. This book provides the scientific approaches to the actual semiconductor silicon production problems. By separating and classifying the phenomena into chemistry, physics and chemical engineering, really simple understanding is possible. The silicon epitaxial growth and doping are the combination of chemical reactions occurring under the gas flow and temperature fields. The etching and surface contamination are similar. Rapid thermal process and flash lamp annealing are simple physics. For solving the cross linked chemistry and physics, numerical calculations are the useful and powerful tool. From the work considering the classical and advanced chemistry utilizing hydrogen, trichlorosilane, chlorine trifluoride and other gases, scientists and engineers will find a new route shedding future materials process development.

Product Specifications
SKU :COC79393
AuthorHitoshi Habuka
LanguageEnglish
BindingPaperback
Number of Pages504
Publishing Year2014-08-04T00:00:00.000
ISBN9783659583001
Edition1 st
Book TypeChemical engineering
Country of ManufactureIndia
Product BrandLAP LAMBERT Academic Publishing
Product Packaging InfoBox
In The Box1 Piece
Product First Available On ClickOnCare.com2015-10-08 00:00:00
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