Miniaturization and power demands of future portable electronic devices require the development of high-power density, easily rechargeable and smallscale power sources. Single-chamber solid oxide fuel cells (SC-SOFCs) constitute a promising approach as the use of a mixture of fuel and oxidant permits simplification of conventional fuel cell systems and development of new cell configurations such as coplanar micro-electrode designs, where microscale anode and cathode are both situated on the same side of the electrolyte. However, the working principles of SC-microSOFCs are not yet fully understood, partly due to the lack of suitable fabrication techniques. In this book, a direct-write microfabrication method was evaluated for creating SC-microSOFCs with coplanar electrodes, and the process steps are discussed in detail. Different parameters affecting the performance of the cells were characterized, including electrode size, shape and material. The obtained results should facilitate fabrication and enable more insight into the operating principles of SC-microSOFCs, and should be useful to those working in the field of micro fuel cells, energy-harvesting systems, MEMS and sensors.