ZnO based semiconductors as transparent electrodes have given wide range of applications in optoelectronic devices due to their wide band gap replacing the conventional GaN semiconductors. This book is the compilation of the work of Venkaiah Malapati which deals with the synthesis and characterization of an interesting room temperature undoped and 3d transition metal doped ZnO thin films by rf magnetron sputtering. this work addresses the following three major questions... (1) what is the effect of working gas pressure on the properties of undoped and Mn, Fe and Mn-Fe co-doped ZnO thin films. Here, the effect of argon and oxygen gas pressure studied undoped and Mn and Fe doped thin films studied. This book includes a systematic study of structure, morphology, optical, mechanical and magnetic properties of undoped Mn, Fe doped ZnO thin films studied. This book should be useful to readers in enhancing their knowledge about thin film preparation and their characterization.